Microprocesses and nanotechnology [...papers, which were presented in the 13th International Microprocesses and Nanotechnology Conference (MNC2000); the conference was held in the University of Tokyo, Komaba Campus, Tokyo, from July 11 through July 13, 2000]
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Format: | UnknownFormat |
Sprache: | eng |
Veröffentlicht: |
Tokyo
Publ. Office, Japanese Journal of Applied Physics
2000
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Schriftenreihe: | Japanese journal of applied physics Regular papers, brief communications & review papers
39,12B : Special issue |
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Beschreibung: | S. 6771 - 7171 S. Ill., graph. Darst. |
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