Resonant three-dimensional electrostatic actuator in silicon technology
We introduce a controlled triaxial electrostatic actuator which is suitable for multiple applications such as force sensing, microprobing, nanoindenting and cell manipulation. The system comprises an arrangement of serpentine springs, three independently controlled electrostatic actuators, one for e...
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| Veröffentlicht in: | Actuator 16 (Veranstaltung : 2016 : Bremen) ACTUATOR 16 |
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| Weitere Verfasser: | , , |
| Pages: | 16 |
| Format: | UnknownFormat |
| Sprache: | eng |
| Veröffentlicht: |
2016
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Tag hinzufügen | Titel | Jahr | Verfasser |
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| Resonant three-dimensional electrostatic actuator in silicon technology | 2016 | Goj, Boris |
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