New approaches to image processing based failure analysis of nano-scale ULSI devices

New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance...

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1. Verfasser:	Zalevsky, Zeev (VerfasserIn)
Weitere Verfasser:	Livshits, Pavel (VerfasserIn), Gur, Eran (VerfasserIn)
Format:	UnknownFormat
Sprache:	eng
Veröffentlicht:	Amsterdam, Boston, Heidelberg William Andrew, an imprint of Elsevier 2014
Schriftenreihe:	Micro & nano technologies series
Schlagworte:	Integrated circuits > Ultra large scale integration > Nanoelectronics > Microelectronics > Mikroelektronik > Nanoelektronik > Störfallanalyse > Bildverarbeitung
Online Zugang:	Verlagsangaben http://site.ebrary.com/lib/alltitles/docDetail.action?docID=10812561
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Zusammenfassung:	New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise
Beschreibung:	Includes bibliographical references
Beschreibung:	101 Seiten Illustrationen, Diagramme
ISBN:	9780323241434 978-0-323-24143-4