Atomic layer deposition applications 8 : [papers ... presented in the Symposium "Atomic Layer Deposition Applications 8", held during the PRiME 2012 joint international meeting of the Electrochemical Society and the Electrochemical Society of Japan ... in Honolulu, Hawaii, from October 7 to 12, 2012]

Atomic layer deposition applications 8 [papers ... presented in the Symposium "Atomic Layer Deposition Applications 8", held during the PRiME 2012 joint international meeting of the Electrochemical Society and the Electrochemical Society of Japan ... in Honolulu, Hawaii, from October 7 to 12, 2012]

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Bibliographische Detailangaben
Körperschaft: Electrochemical Society Dielectric Science and Technology Division (BerichterstatterIn)
Weitere Verfasser: Elam, Jeffrey W. (BerichterstatterIn)
Format: UnknownFormat
Sprache:eng
Veröffentlicht: Pennington, NJ ECS 2012
Schriftenreihe:ECS transactions Dielectric and semiconductor materials, devices, and processing 50,13
Schlagworte:
Konferenzschrift
Online Zugang:Inhaltsverzeichnis
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