Helium ion microscopy : principles and applications

Helium ion microscopy principles and applications

Introduction to Helium Ion MicroscopyMicroscopy with Ions: A Brief HistoryOperating the Helium Ion MicroscopeIon-Solid Interactions and Image FormationCharging and DamageMicroanalysis with HIMIon-Generated DamageWorking with Other Ion beamsPatterning and Nanofabrication.

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: Joy, David C. (VerfasserIn)
Format: UnknownFormat
Sprache:eng
Veröffentlicht: New York, NY, Heidelberg u.a. Springer 2013
Schriftenreihe:Springer-briefs in materials
Schlagworte:
Field ion microscopy > Helium ions > Ion bombardment > Spectroscopy > Nanotechnology > Surfaces (Physics) > Materials Science > Rasterelektronenmikroskopie > Ionenstrahl > Heliumion > Ionenmikroskop
Online Zugang:Inhaltsverzeichnis
Cover
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Introduction to Helium Ion MicroscopyMicroscopy with Ions: A Brief HistoryOperating the Helium Ion MicroscopeIon-Solid Interactions and Image FormationCharging and DamageMicroanalysis with HIMIon-Generated DamageWorking with Other Ion beamsPatterning and Nanofabrication.
Beschreibung:Includes bibliographical references and index
Author: David C. Joy (University of Tennessee, Knoxville, TN, USA)
Beschreibung:VIII, 64 S.
Ill., graph. Darst.
ISBN:9781461486596
978-1-4614-8659-6