Application of an interferometric phase contrast method to fabricate arbitrary diffractive optical elements

A novel approach for the fabrication of diffractive optical elements is described. This approach is based on an interferometric phase contrast method that transforms a complex object wavefront into an intensity pattern. The resulting intensity pattern is used to expose a photoresist layer on a subst...

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Veröffentlicht in:Applied optics
Weitere Verfasser: Teschke, Marcel (BerichterstatterIn), Heyer, Robert (BerichterstatterIn), Fritzsche, Marco (BerichterstatterIn), Stoebenau, Sebastian (BerichterstatterIn), Sinzinger, Stefan (BerichterstatterIn)
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Sprache:eng
Veröffentlicht: 2008
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