Application of an interferometric phase contrast method to fabricate arbitrary diffractive optical elements

A novel approach for the fabrication of diffractive optical elements is described. This approach is based on an interferometric phase contrast method that transforms a complex object wavefront into an intensity pattern. The resulting intensity pattern is used to expose a photoresist layer on a subst...

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Veröffentlicht in:Applied optics
Weitere Verfasser: Teschke, Marcel (BerichterstatterIn), Heyer, Robert (BerichterstatterIn), Fritzsche, Marco (BerichterstatterIn), Stoebenau, Sebastian (BerichterstatterIn), Sinzinger, Stefan (BerichterstatterIn)
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Sprache:eng
Veröffentlicht: 2008
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Zusammenfassung:A novel approach for the fabrication of diffractive optical elements is described. This approach is based on an interferometric phase contrast method that transforms a complex object wavefront into an intensity pattern. The resulting intensity pattern is used to expose a photoresist layer on a substrate. After development, a diffractive phase object with an on-axis diffraction pattern is achieved. We show that the interferometric phase contrast method allows a precise control of the resulting intensity pattern. An array of blazed Fresnel lenses is realized in photoresist by using kinoform or detour-phase computer holograms for the interferometric phase contrast setup.
ISSN:1559-128X