Effect of post annealing on the structure of Boron Nitride films Li,

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Veröffentlicht in:	IMSS International Conference on Future Manufacturing Engineering (2014 : Hongkong) Advances in future manufacturing engineering
1. Verfasser:	Zhan, M. Y. (VerfasserIn)
Weitere Verfasser:	Fang, H. Y. (VerfasserIn), Cao, R. R. (VerfasserIn), Wang, F. (VerfasserIn), Feng, Y. L. (VerfasserIn), Li, C. J. (VerfasserIn), Wang, M. (VerfasserIn), Li, K. (VerfasserIn), Zhang, K. L. (VerfasserIn), Yang, B. H. (VerfasserIn)
Format:	UnknownFormat
Sprache:	eng
Veröffentlicht:	2015
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