Gross Fracture Pits at the Intersection of Two Single Scratches During Grinding of Silicon

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Veröffentlicht in:SME North American Manufacturing Research Conference (50. : 2022 : West Lafayette, Ind.) 50th SME North American Manufacturing Research Conference 2022 (NAMRC 50) ; Part 1 of 2
1. Verfasser: Dhiman, Anmol (VerfasserIn)
Weitere Verfasser: Subbiah, Sathyan (VerfasserIn)
Pages:50
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2023
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