Dual Axes Scanning Micro Mirror Using Electromagnetic Actuators and Elastic Compliant Membrane

Dual Axes Scanning Micro Mirror Using Electromagnetic Actuators and Elastic Compliant Membrane

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Veröffentlicht in:ASME Conference on Information Storage and Processing Systems (32. : 2023 : Milpitas, Calif.) Proceedings of the ASME 2023 32nd Conference on Information Storage and Processing Systems (ISPS2023)
1. Verfasser: Shin, Buhyun (VerfasserIn)
Weitere Verfasser: Kim, Youngshik (VerfasserIn), Kim, Wan-Chin (VerfasserIn)
Pages:2023 32
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Sprache:eng
Veröffentlicht: 2023
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