Structure and thermal stabilitv of sputtered Ir films

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Veröffentlicht in:Chotai-Kankyosei-Senshin-Zairyo-Shinpojiumu (3 : 1992 : Tokio) Dai 3kai Chōtai Kankyōsei Senshin Zairyō Shinpojiumu
1. Verfasser: Echigoya, ‚Jun -ichi (VerfasserIn)
Pages:3
Format: UnknownFormat
Sprache:jpn
Veröffentlicht: 1992
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