Reduced Order Modelling for Wafer Heating with the Method of Freezing

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Veröffentlicht in:	SCEE (13. : 2020 : Eindhoven) Scientific computing in electrical engineering
1. Verfasser:	Hoeijmakers, E. J. I. (VerfasserIn)
Weitere Verfasser:	Bansal, H. (VerfasserIn), van Opstal, T. M. (VerfasserIn), Bobbert, P. A. (VerfasserIn)
Format:	UnknownFormat
Sprache:	eng
Veröffentlicht:	2021
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