A Novel Surface Mesh Simplification Method for Flux-Dependent Topography Simulations of Semiconductor Fabrication Processes

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Veröffentlicht in:	SCEE (13. : 2020 : Eindhoven) Scientific computing in electrical engineering
1. Verfasser:	Lenz, Christoph (VerfasserIn)
Weitere Verfasser:	Scharinger, Alexander (VerfasserIn), Manstetten, Paul (VerfasserIn), Hössinger, Andreas (VerfasserIn), Weinbub, Josef (VerfasserIn)
Format:	UnknownFormat
Sprache:	eng
Veröffentlicht:	2021
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