Effect of positive substrate bias on microstructural, structural, and phonon characteristics of nanocrystalline silicon thin films

Effect of positive substrate bias on microstructural, structural, and phonon characteristics of nanocrystalline silicon thin films

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Veröffentlicht in:International Conference on Mechanical Materials and Renewable Energy (2. : 2019 : Majitar) 2nd International Conference on Mechanical Materials and Renewable Energy (ICMMRE 2019)
1. Verfasser: Rizal, Umesh (VerfasserIn)
Weitere Verfasser: Swain, Bibhu P. (VerfasserIn)
Pages:2
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2020
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