Low-Temperature Growth of Piezoelectric AIN Film and its Optical and Acoustical Properties

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Veröffentlicht in:Symposium on Ultrasonic Electronics (2 : 1981 : Tokio) Proceedings of the 2nd Symposium on Ultrasonic Electronics
1. Verfasser: SHIOSAKI, Tadashi (VerfasserIn)
Weitere Verfasser: HARADA, Kazushige (VerfasserIn), KAWABATA, Akira (VerfasserIn)
Pages:2
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Sprache:eng
Veröffentlicht: 1982
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