Improved Wet Cleaning Process using Electrolytic lonized Water — Application in TFT-LCD Manufacturing—

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Bibliographische Detailangaben
Veröffentlicht in:	Proceeding
1. Verfasser:	IMAOKA, Takashi (VerfasserIn)
Weitere Verfasser:	YOSIZAWA, Michio (VerfasserIn), YAMANAKA, Koji (VerfasserIn), MITSUMORI, Ken-ichi (VerfasserIn), OH, Eui-Yeol (VerfasserIn), KASAMA, Yasuyuki (VerfasserIn), KATO, Masayuki (VerfasserIn), TODA, Masayuki (VerfasserIn), OJIMA, Senri (VerfasserIn), KUBO, Kazuki (VerfasserIn), MARITA, Hiroshi (VerfasserIn), OHMI, Tadahiro (VerfasserIn)
Format:	UnknownFormat
Sprache:	eng
Veröffentlicht:	1995
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Titel	Jahr	Verfasser
Proposal of New Wet Chemical Cleaning beyond RCA	1995	OHMI, Tadahiro
The Cleaning by Fluorine Etchant and Metallic Vessel for HF Cleaning with Megasonic	1995	IZUMI, Hirito
Why is Fine Sonic Necessary for the Cleaning Process	1995	HARADA, Yasuyuki
Pollution Monitoring of Trace Species using Photoacoustic Technique	1995	SAWADA, Tsuguo
Chemistry of Ultra Pure Water Excited by Megasonic	1995	TODA, Masayuki
Megasonic Generation and Applied Cleaning	1995	FUJIE, Akio
Influence of Contamination Impurities on Defect Generation in Si	1995	TAKANO, Yukio
Combining p-Type and n-Type Si Recombination Lifetime Measurement for Determining the Kind and Amount of Metallic Impurities	1995	ITSUMI, Manabu
Measurement of Trace Moisture Concentration in SiH4	1995	OKAMURA, Kenji
Bridging Electronics to Electrical Chemistry at Silicon Surface	1995	OHMI, Tadahiro
Improved Wet Cleaning Process using Electrolytic lonized Water — Application in TFT-LCD Manufacturing—	1995	IMAOKA, Takashi
New Concept Wet Station	1995	MURAOKA, Yusuke
Three-Dimensional Chemical State Analysis	1995	NINOMIYA, Ken
X-ray Microscopy	1995	SUZUKI, Yoshio
One-Nanometer-Order Z-Axis Calibration of AFM	1995	SUZUKI, Mineharu
Chemical Composition Control Method to Control Wet Process	1995	MIYASHITA, Masayuki
Contamination Analysis on Silicon Wafer/Glass Surface by Time-of-Flight Secondary lon Mass Spectrometry (TOF-SIMS)	1995	SADO, Manabu
Measurement of the Geometrical Dimensions using the Scanning Electron Microscope	1995	MIYOSHI, Motosuke