Research of the Microelectromechanical Device Cross-Shaped Element

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Veröffentlicht in:International Youth Conference on Electronics, Telecommunications and Information Technologies (2021 : Sankt Petersburg) International Youth Conference on Electronics, Telecommunications and Information Technologies
1. Verfasser: Lysenko, Igor E. (VerfasserIn)
Weitere Verfasser: Kidyaev, Nikolai F. (VerfasserIn), Ezhova, Olga A. (VerfasserIn)
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Sprache:eng
Veröffentlicht: 2022
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