DETC2022-89962 Frequency-Amplitude Response of Parametric Resonance of Electrostaticaliy Actuated MEMS Cantilever Beams Driven by Fringe Effect

DETC2022-89962 Frequency-Amplitude Response of Parametric Resonance of Electrostaticaliy Actuated MEMS Cantilever Beams Driven by Fringe Effect

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Veröffentlicht in:ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (2022 : Saint Louis, Mo.) Proceedings of ASME 2022 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (IDETC-CIE 2022) ; Volume 10: 34th Conference on Mechanical Vibration and Sound (VIB)
1. Verfasser: Martinez, Miguel A. (VerfasserIn)
Weitere Verfasser: Caruntu, Dumitru I. (VerfasserIn)
Pages:2022
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2022
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