Magnetic Levitation Fine Stage with Pitching Moment and Gravity Compensation System

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Bibliographische Detailangaben
Veröffentlicht in:	ASPE Annual Meeting (35. : 2020 : Online) 35th ASPE Annual Meeting 2020
1. Verfasser:	Takahashi, M. (VerfasserIn)
Weitere Verfasser:	Ogawa, H. (VerfasserIn), Saegusa, T. (VerfasserIn)
Pages:	35
Format:	UnknownFormat
Sprache:	eng
Veröffentlicht:	2021
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