Magnetic Levitated Linear Scan Module with Nanometer Resolution

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Bibliographische Detailangaben
Veröffentlicht in:	ASPE Annual Meeting (35. : 2020 : Online) 35th ASPE Annual Meeting 2020
1. Verfasser:	Goos, A. (VerfasserIn)
Weitere Verfasser:	Ehrle, R. (VerfasserIn), Geissler, D. (VerfasserIn), Gloess, R. (VerfasserIn)
Pages:	35
Format:	UnknownFormat
Sprache:	eng
Veröffentlicht:	2021
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