DETC2020-22210 Linearization of Characteristic Response of a Capacitive MEMS Pressure Sensor by Patterning the Dielectric Layer

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Veröffentlicht in:ASME International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (2020 : Online) Proceedings of the ASME International Design Engineering Technical Conferences & Computers and Information in Engineering Conference - 2020 ; Volume 1: 14th Intenational Conference on Micro- and Nanosystems (MNS 2020)
1. Verfasser: Tolouei, Nadia Ebrahimpour (VerfasserIn)
Weitere Verfasser: Shavezipur, Mohammad (VerfasserIn)
Pages:2020
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2020
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