Controllable Optical Characteristics of TiN Films Prepared by Magnetron Sputtering

Controllable Optical Characteristics of TiN Films Prepared by Magnetron Sputtering

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Veröffentlicht in:International Conference on Optoelectronics and Measurement (2. : 2019 : Hangzhou) Proceedings of 2019 International Conference on Optoelectronics and Measurement
1. Verfasser: Xu, Kai (VerfasserIn)
Weitere Verfasser: Meng, Yan-Long (VerfasserIn), Liu, Si-Meng (VerfasserIn), Tan, Jun (VerfasserIn)
Pages:2019
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Sprache:eng
Veröffentlicht: 2021
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