Physical properties of high resistivity Si, Si/SiO2 wafers and CMOS diode under 10 MeV electron irradiation

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Veröffentlicht in:Materials Research Society of Thailand (2. : 2019 : Pattaya) The second Materials Research Society of Thailand International Conference
1. Verfasser: Neaosuphap, Sakdinan (VerfasserIn)
Weitere Verfasser: Prabket, Jirawat (VerfasserIn), Chanlek, Narong (VerfasserIn), Kobdaj, Chinorat (VerfasserIn)
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Sprache:eng
Veröffentlicht: 2020
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