The Effect of Grown-in Defects in CZ-Si Crystals on Gate Oxide Integrity

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Veröffentlicht in:Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (44. : 1993 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 44kai Shinpojiumu
1. Verfasser: Sadamitsu, S. (VerfasserIn)
Weitere Verfasser: Sano, M. (VerfasserIn), Sumita, S. (VerfasserIn), Shigematsu, T. (VerfasserIn)
Pages:44
Format: UnknownFormat
Sprache:jpn
Veröffentlicht: 1993
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