Stress Distribution and Void Growth in Aluminum Interconnect

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Veröffentlicht in:Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (38. : 1990 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 38kai Shinpojiumu
1. Verfasser: Niwa, H. (VerfasserIn)
Weitere Verfasser: Yagi, H. (VerfasserIn), Tsuchikawa, H. (VerfasserIn)
Pages:38
Format: UnknownFormat
Sprache:jpn
Veröffentlicht: 1990
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