HETEROEPITAXIAL GROWTH OF SrO FILMS ON Si SUBSTRATES

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Bibliographische Detailangaben
Veröffentlicht in:	Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (30. : 1986 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 30kai Shinpojiumu
1. Verfasser:	Kado, Y. (VerfasserIn)
Weitere Verfasser:	Arita, Y. (VerfasserIn)
Pages:	30
Format:	UnknownFormat
Sprache:	jpn
Veröffentlicht:	1986
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Titel	Jahr	Verfasser
CHEMISTRY OF MICROLITHOGRAPHY	1986	Hasegawa, M.
NEW POSITIVE – WORKING PHOTORESIST FOR SUBMICRON LITHOGRAPHY	1986	Shoji, T.
MOS IMAGE SENSOR OVERLAID WITH AMORPHOUS SILICON	1986	Higashi, A.
PREPARATION AND PROPERTIES OF CLEAN SILICON SURFACES	1986	Kawazu, A.
X-RAY LITHOGRAPHY WITH A NEGATIVE RESIST	1986	Suzuki, Y.
TUNGSTEN MULTI–LAYER INTERCONNECTIONS FORMED BY CHEMICAL VAPOR DEPOSITION	1986	Hara, T.
INFLUENCE OF OXYGEN CONTAMINATION ON PLATINUM SILICIDE FORMATION	1986	Takahashi, Y.
CHARACTERISTICS OF MOLYBDENUM SILICIDE MASK	1986	Shigetomi, A.
A TWO–DIMENSIONAL ETCHING PROFILE SIMULATOR : ESPRIT	1986	Yamamoto, S.
HETERO – EPITAXY OF Ge BY MBE AND ITS APPLICATION TO THE OHMIC CONTACT	1986	Kimura, T.
EB DIRECT WRITING WITH THE TRILAYER RESISTS	1986	Kitakata, M.
Mo–TO–Al OHMIC CONTACT FORMATION BY DIRECT WRITING OF Mo LINES USING LASER INDUCED CVD	1986	Uesugi, F.
NEW TECHNOLOGY FOR CONNECTING ELECTRODES OF FLAT DISPLAY PANELS WITH LIGHT–SETTING INSULATION RESIN	1986	Hatada, K.
PHOTO–CVD TECHNIQUE FOR INSULATING FILM	1986	Hisamume, Y.
A CHARGE–UP PHENOMENON AND ITS PREVENTION OF AsSG	1986	Sakai, C.
ELECTRICAL CHARACTERISTICS OF TUNNEL OXIDE OF EEPROM	1986	Kobayashi, K.
FORMATION OF SUBMICRON Al LINE PATTERN BY PCM PROCESS	1986	Watanabe, K.
THERMAL BEHAVIOR OF MCZ–NTD SILICON	1986	Wakatsuki, M.
INFRARED RAPID THERMAL ANNEALING OF ION–IMPLANTED 2–INCH	1986	Tamura, A.
HETEROEPITAXIAL GROWTH OF SrO FILMS ON Si SUBSTRATES	1986	Kado, Y.