Job scheduling of diffusion furnaces in semiconductor fabrication facilities

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Veröffentlicht in:European journal of operational research
1. Verfasser: Wu, Kan (VerfasserIn)
Weitere Verfasser: Huang, Edward (VerfasserIn), Wang, Mengchang (VerfasserIn), Zheng, Meimei (VerfasserIn)
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Sprache:eng
Veröffentlicht: 2022
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