Scaling limit of high-k gate dielectrics

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Bibliographische Detailangaben
Veröffentlicht in:	Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (61 : 2001 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-61.-Shinpojiumu-kōen-ronbunshū
1. Verfasser:	Hiratani, M. (VerfasserIn)
Weitere Verfasser:	Torii, K. (VerfasserIn), Shimamoto, Y. (VerfasserIn)
Pages:	61
Format:	UnknownFormat
Sprache:	jpn
Veröffentlicht:	2001
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