Mechanism and Reduction of Interlayer Peeling Defect in IGZO TFTs Formation

Mechanism and Reduction of Interlayer Peeling Defect in IGZO TFTs Formation

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Veröffentlicht in:International Conference on Green Composite Materials and Nanotechnology (3. : 2019 : Shenzhen) Green composite materials, polymers and nanotechnology
1. Verfasser: Wan, G. M. (VerfasserIn)
Weitere Verfasser: Ge, S. M. (VerfasserIn), Gong, C. (VerfasserIn), Li, S. (VerfasserIn), Lin, X. N. (VerfasserIn)
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Sprache:eng
Veröffentlicht: 2020
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