IMECE2019-10692 Investigating the Purge Flow Rate in a Reactor Scale Simulation of an Atomic Layer Deposition Process

IMECE2019-10692 Investigating the Purge Flow Rate in a Reactor Scale Simulation of an Atomic Layer Deposition Process

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Veröffentlicht in:ASME International Mechanical Engineering Congress and Exposition (2019 : Salt Lake City, Utah) Proceedings of the ASME International Mechanical Engineering Congress and Exposition - 2019 ; Volume 2, B
1. Verfasser: Nwanna, Emeka Charles (VerfasserIn)
Weitere Verfasser: Coetzee, Rigardt Alfred Maarten (VerfasserIn), Jen, Tien-Chien (VerfasserIn)
Pages:2019
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2020
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