ISPS/MIPE2018-8542 MEMS-Based Micro Probe Incorporating Electrostatic Actuator Towards Friction Force Microscopy With Accurate Gap Control

ISPS/MIPE2018-8542 MEMS-Based Micro Probe Incorporating Electrostatic Actuator Towards Friction Force Microscopy With Accurate Gap Control

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Veröffentlicht in:ASME/JSME Joint International Conference on Information Storage and Processing Systems and Micromechatronics for Information and Precision Equipment (2018 : San Francisco, Calif.) Proceedings of the ASME/JSME Joint International Conference on Information Storage and Processing Systems and Micromechatronics for Information and Precision Equipment - 2018
1. Verfasser: Fukuzawa, Kenji (VerfasserIn)
Weitere Verfasser: Takahashi, Mikito (VerfasserIn), Hori, Yusuke (VerfasserIn), Itoh, Shintaro (VerfasserIn), Zhang, Hedong (VerfasserIn)
Pages:2018
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2018
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