Focused Ion Beam Fabrication: Process Development and Optimization Strategy for Optical Applications

Focused Ion Beam Fabrication: Process Development and Optimization Strategy for Optical Applications

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Bibliographische Detailangaben
Veröffentlicht in:AIMTDR (27. : 2016 : Pune) Precision Product-Process Design and Optimization
1. Verfasser: Garg, Vivek (VerfasserIn)
Weitere Verfasser: Mote, Rakesh G. (VerfasserIn), Fu, Jing (VerfasserIn)
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Sprache:eng
Veröffentlicht: 2018
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