Molecular Design and Syntheses of Ultra Tough Organic Low-k Dielectrics

von Aoi, N.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (64 : 2003 : Osaka) Handōtai, Shuseki-Kairo-Gijutsu-64.-Shinpojiumu-kōen-ronbunshū (2003)

LOW TEMPERATURE PLANALIZATION TECHNIQUE FOR MULTILAYER INTERCONNECTIONS IN GaAs LSI PROCESS

von Miyazaki, M.
Veröffentlicht in Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (31. : 1986 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 31kai Shinpojiumu (1986)

A Noble Process for Multilevel Interconnects with Effective Reduction of PFC Etching Gas and Energy Consumption and High Cost Performance:Line-Pillar Process

von Itoh, H.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (66 : 2004 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-66.-Shinpojiumu-kōen-ronbunshū (2004)

Evaluation and Analysis for Mechanical Strengths of Low-K Dielectrics

von Aoi, N.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (60 : 2001 : Osaka) Handōtai, Shuseki-Kairo-Gijutsu-60.-Shinpojiumu-kōen-ronbunshū (2001)

Borazine-siloxane Polymer and it's Application

von Inoue, M.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (63 : 2002 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-63.-Shinpojiumu-kōen-ronbunshū (2002)