A Low-Pressure Aerosol Sampler

von Whitby, E.
Veröffentlicht in Earozoru Kagaku, Gijutsu Kenkyū Tōronkai (10. : 1993 : Muroran) Dai 10kai Earozoru Kagaku, Gijutsu Kenkyū Tōronkai (1993)

Number Concentration and Size Distribution of SiO, Particles Near a Heated Wafer in a Low-Pressure SiH4: O2: He CVD Reactor: Comparison of Experimental and Numerical Results

von Whitby, E.
Veröffentlicht in Earozoru Kagaku, Gijutsu Kenkyū Tōronkai (10. : 1993 : Muroran) Dai 10kai Earozoru Kagaku, Gijutsu Kenkyū Tōronkai (1993)