Formation of the SOI Structure by Vertical Solid-Phase Epitaxial Crystallization of Amorphous Silicon with the Seed Supplied from the Top

von Uzawa, Y.
Veröffentlicht in Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (41. : 1991 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 41kai Shinpojiumu (1991)