Dependence of Line Width on Pattern-Pitch in Chemically Amplified Resist

von Usujima, A.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (50 : 1996 : Tokio) 50. Handōtai Shuseki Kairo Gijutsu Shinpojiumu Kōen Ronbunshū (1996)