Mo–TO–Al OHMIC CONTACT FORMATION BY DIRECT WRITING OF Mo LINES USING LASER INDUCED CVD

von Uesugi, F.
Veröffentlicht in Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (30. : 1986 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 30kai Shinpojiumu (1986)