Special issue on advanced microfabrication processes for MEMS/NEMS

Veröffentlicht 2023

ISPS/MIPE2018-8529 Development of a Metal-Cantilever Electrostatic Vibration Power Generator Combined With Potassium lon Electret Technique

von Koga, Hideaki
Veröffentlicht in ASME/JSME Joint International Conference on Information Storage and Processing Systems and Micromechatronics for Information and Precision Equipment (2018 : San Francisco, Calif.) Proceedings of the ASME/JSME Joint International Conference on Information Storage and Processing Systems and Micromechatronics for Information and Precision Equipment - 2018 (2018)

A Wafer-level System Integration Technology for Flexible Pseudo-SOC Incorporates Mems-cmos Heterogeneous Devices

von Yamada, Hiroshi
Veröffentlicht in 2010 IEEE CPMT Symposium Japan (2010)