THERMAL SHOCK AND PROPERTY AT HIGH TEMPERATURE OF GRAPHITE

von Tokunaga, K.
Veröffentlicht in Symposium Muon Science (2001 : Tsukuba) Tōgō-keikaku-myuon-kagaku-2001-shinpojiumu ; January 26 - 27, 2001, KEK, Tsukuba, Japan (2001)

Ferroelectric Films Deposited by Reactive Sputtering and Their Properties

von FUKAMI, T.
Veröffentlicht in Meeting on Ferroelectric Materials and Their Applications (4 : 1983 : Kyōto) Proceedings of the 4th Meeting on Ferroelectric Materials and Their Applications (1983)

Modeling of Chemical Mechanical Polishing Process for Three-dimensional Simulatio

von Takahashi, H.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (53 : 1997 : Tokio) 53. Handōtai Shuseki Kairo Gijutsu Shinpojiumu Kōen Ronbunshū (1997)

0.2 µm Shallow Trench Isolation Technology without Reverse Narrow Channel Effect using Angled Trench Side Wall Implantation

von Abiko, H.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (53 : 1997 : Tokio) 53. Handōtai Shuseki Kairo Gijutsu Shinpojiumu Kōen Ronbunshū (1997)

Multilevel Interconnects Technologies Using Cu and an Orgnic low-k Dielectrics

von Yamamura, I.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (57 : 1999 : Tokio) 57.-Handōtai-Shuseki-Kairo-Gijutsu-Shinpojiumu-kōen-ronbunshū (1999)

Copper Dual Damascene Interconnects with Low-K (K/sub eff/<3.0) Dielectrics Using FLARE/sup TM/ and an MSQ Hard Mask

von Hasegawa, T.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (58 : 2000 : Tokio) 58.-Handōtai-Shuseki-Kairo-Gijutsu-Shinpojiumu-kōen-ronbunshū (2000)