A New Integration Scheme to Prevent Chemical Attack on Floating Polysilicon Gate of Non-Volatile Memory

von Yang, Y.
Veröffentlicht in Symposium "Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications" (14. : 2024 : San Francisco, Calif.) Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 14 (2024)