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13NOVEL MICROFABRICATION TECHNIQUE OF 3D SILICONE STRUCTURES FROM PLANAR SUBSTRATE BY TENSILE BUCKLINGvon Arambel, P.
Veröffentlicht in International Conference on Miniaturized Systems for Chemistry and Life Sciences (21. : 2017 : Savannah, Ga.) 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2017) ; Volume 3 of 3 (2020)UnknownFormat -
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