ISPS/MIPE2018-8542 MEMS-Based Micro Probe Incorporating Electrostatic Actuator Towards Friction Force Microscopy With Accurate Gap Control

von Fukuzawa, Kenji
Veröffentlicht in ASME/JSME Joint International Conference on Information Storage and Processing Systems and Micromechatronics for Information and Precision Equipment (2018 : San Francisco, Calif.) Proceedings of the ASME/JSME Joint International Conference on Information Storage and Processing Systems and Micromechatronics for Information and Precision Equipment - 2018 (2018)