Integrated Circuits Examination by Means of a Low-Acceleration SEM

von Todokoro, H.
Veröffentlicht in Symposium on Reliability and Maintainability (10. : 1980 : Tokio) 10th Symposium on Reliability and Maintainability (1980)

Process Characterization of MOS Devices by Scanning Electron Microscopy with 0.5-1 kV Electrons

von HASHIMOTO, N.
Veröffentlicht in Conference on Solid State Devices (13 : 1981 : Tokio) Proceedings of the 13th Conference on Solid State Devices (1982)