Adsorption Behavior of Organic Contaminants on the Silicon Wafer

von Sugimoto, F.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (51 : 1996 : Tokio) 51. Handōtai Shuseki Kairo Gijutsu Shinpojiumu Kōen Ronbunshū (1996)

Electrochemical capacitors: fundamentals to applications : [papers ... presented in the Symposium "Electrochemical Capacitors: Fundamentals to Applications", held during the 226t...

Veröffentlicht 2015

A highly reliable Cu/VLK(k<2.3) multilevel interconnects for SoC technologies on 65nm node and beyond

von Sugiura, I.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (65 : 2003 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-65.-Shinpojiumu-kōen-ronbunshū (2003)