The Improvement of DCS-WSix-CVD Process by Adding H2, SiH4, Si2H5

von Shimogaki, Y.
Veröffentlicht in Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (48 : 1995 : Tokio) 48. Handōtai Shuseki Kairo Gijutsu Shinpojiumu Kōen Ronbunshū (1995)