Dislocation Vector Analysis Method of Deep Dislocation Having C-Axis Segment in Diamond

von Shikata, S.
Veröffentlicht in International Conference on Silicon Carbide and Related Materials (18. : 2019 : Kyōto) Silicon carbide and related materials 2019 (2020)

FORMATION OF SUBMICRON SILICON NITRIDE PATTERNS BY LIFT-OFF METHOD USING ECR-CVD

von Shikata, S.
Veröffentlicht in Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (31. : 1986 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 31kai Shinpojiumu (1986)