The Effect of Grown-in Defects in CZ-Si Crystals on Gate Oxide Integrity

von Sadamitsu, S.
Veröffentlicht in Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (44. : 1993 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 44kai Shinpojiumu (1993)

Improvement of Gate Oxide Integrity by Reducing Grown-in Defects in CZ Crystal

von Nishikawa, H.
Veröffentlicht in Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (45. : 1993 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 45kai Shinpojiumu (1993)