APPLICATION OF RF (40.68 MHZ) ARC DISCHARGE FOR PLASMA CHEMICAL CONVERSION OF VOLATILE CHLORIDES OF SILICON AND GERMANIUM

von Kornev, R.
Veröffentlicht in Symposium on Physics of Switching Arc (23. : 2019 : Neustadtl, Mähren) 23rd Symposium on Physics of Switching Arc 2019 (2020)