DETC2021-67179 Tristable Properties in Electrostatically Actuated Initially Curved Coupled Micro Beams

von Medina, Lior
Veröffentlicht in International Conference on Micro- and Nanosystems (15. : 2021 : Online) Proceedings of the ASME 2021 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (IDETC-CIE2021) ; volume 11: 15th International Conference on Micro- and Nanosystems (MNS) (2021)