Evidence of Channel Mobility Anisotropy on 4H-SiC MOSFETS with Low Interface Trap Density

von Rebollo, M. Cabello, V. Soler, D. Haasmann, J. Montserrat, J.
Veröffentlicht in European Conference on Silicon Carbide and Related Materials (12. : 2018 : Birmingham) Silicon carbide and related materials 2018 (2019)